Surface measuring apparatus using a probe microscope

Measuring and testing – Vibration – By mechanical waves

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73634, 73643, 250307, 250423F, G01N 2924

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active

054310555

ABSTRACT:
A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample, a strain wave detecting device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.

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