Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate
2011-01-25
2011-01-25
Nghiem, Michael P (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
Reexamination Certificate
active
07877227
ABSTRACT:
A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
REFERENCES:
patent: 4053231 (1977-10-01), Fletcher et al.
patent: 4225240 (1980-09-01), Balasubramanian
patent: 5471305 (1995-11-01), Yoneda et al.
patent: 5812407 (1998-09-01), Shuzo et al.
patent: 6184994 (2001-02-01), Freischlad
patent: 2003/0011784 (2003-01-01), De Groot et al.
patent: 2005/0225769 (2005-10-01), Bankhead et al.
patent: 2005/0279954 (2005-12-01), Brunfeld et al.
patent: 2007/0220958 (2007-09-01), Gotthard et al.
patent: 2008/0000291 (2008-01-01), Masser
patent: WO 03/078925 (2003-09-01), None
patent: WO 2004/048886 (2004-06-01), None
patent: WO 2004/104517 (2004-12-01), None
patent: WO 2006/005959 (2006-01-01), None
Byron S. Lee, Timothy C. Strand, Profilometry with a Coherence Scanning Microscope, published in Applied Optics, vol. 29, No. 26, Sep. 10, 1990, pp. 3784-3788.
International Search Report, dated Aug. 10, 2007.
United Kingdom Office Action dated Dec. 11, 2009.
European Office Action dated Jan. 14, 2010.
Bankhead Andrew Douglas
Mansfield Daniel Ian
McDonnell Ivor
Khuu Cindy H
Nghiem Michael P
RatnerPrestia
Taylor Hobson Limited
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