Optics: measuring and testing – Standard
Patent
1997-04-28
1998-12-08
Rosenberger, Richard A.
Optics: measuring and testing
Standard
356237, G02B 500, G01N 2188
Patent
active
058478230
ABSTRACT:
A calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results.
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Brannon James Hammond
Imaino Wayne Isami
Juliana, Jr. Anthony
Latta Milton Russell
Lee Charles H.
International Business Machines - Corporation
Knight G. Marlin
Rosenberger Richard A.
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