Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1997-04-09
1998-10-20
Font, Frank G.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356338, 356445, 356448, G01N 2100
Patent
active
058254820
ABSTRACT:
An optical surface inspection system is designed to correct for misregistration errors. A reference vector of data samples is obtained by computing an average of adjacent data sample vectors. A comparison of the data samples in a current vector being processed to data samples that may be offset from such current vector along the direction of the current vector enables the detection and correction of misregistration errors. Alternatively, a target array of data samples is compared to a reference array of data samples collected from a different portion of the surface with various offsets for detection and correction of misregistration errors. The intensity of the reflection from the inspection beam may be monitored to vary the intensity of the inspection beam so as to reduce the dynamic range of background scattering.
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Nikoonahad Mehrdad
Wayman Charles E.
Font Frank G.
Kla-Tencor Corporation
Ratliff Reginald A.
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