Surface inspection system with improved capabilities

Details Surface inspection system with improved capabilities Surface inspection system with improved capabilities

2005-10-03

2008-12-30

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500

Reexamination Certificate

active

07471382

ABSTRACT:
Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.

REFERENCES:
patent: 5864394 (1999-01-01), Jordan et al.
patent: 6166393 (2000-12-01), Paul et al.
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6215551 (2001-04-01), Nikoonahad et al.
patent: 6271916 (2001-08-01), Marxer et al.
patent: 6496256 (2002-12-01), Eytan et al.
patent: 6538730 (2003-03-01), Vaez-Iravani et al.
patent: 2002/0051130 (2002-05-01), Marxer et al.
patent: 2004/0036863 (2004-02-01), Matsusita et al.
patent: 2004/0042001 (2004-03-01), Vaez-Iravani et al.
patent: 2005/0018181 (2005-01-01), Vaez-Iravani et al.
patent: 4134747 (1993-04-01), None
Notification Of Transmittal Of The International Search Report And The Written Opinion Of The International Searching Authority for International Application No. PCT/US2005/035867, Date of Mailing Mar. 27, 2006, 11 pages.
Gottlieb, “Acoustooptic Scanners and Modulators”, Optical Scanning, Dekker 1991, pp. 615-685.
Hackerott, Semiconductor Wafermap Mathematics, May 9, 2001, 11 pages.

Affiliated with

Also associated with

Rating

Surface inspection system with improved capabilities does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface inspection system with improved capabilities, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface inspection system with improved capabilities will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4026039