Surface inspection of a disk by diffraction pattern sampling

Details Surface inspection of a disk by diffraction pattern sampling Surface inspection of a disk by diffraction pattern sampling

1996-04-15

1998-07-14

Chang, Jon

Image analysis

Applications

Surface texture or roughness measuring

382141, 356371, G06T 700

Patent

active

057816492

ABSTRACT:
An optical inspection apparatus detects anomalies by reflecting a beam of coherent light off the surface of a sample. An anomaly present on the surface causes the reflected beam to be diffracted at an angle which corresponds to a scale of the anomaly. An optical detection array is positioned to receive the reflected diffraction pattern and produce an electrical signal which corresponds to the diffraction angle of the reflected pattern. The electrical signal may then be processed to determine the location and scale of the anomaly from the detected diffraction angle.

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