Surface inspection method, surface inspection apparatus, and pri

Details Surface inspection method, surface inspection apparatus, and pri Surface inspection method, surface inspection apparatus, and pri

1997-01-21

1999-05-18

Epps, Georgia

Optical: systems and elements

Single channel simultaneously to or from plural channels

3562411, 359629, G02B27/10;27/14

Patent

active

059055952

ABSTRACT:
A method for inspecting the surface of an inspection object with a picked-up image obtained by entering light from the inspection object into an annular prism, and picking-up the light emitted from the prism, and an apparatus used for execution thereof. Also a prism composed of a columnar light permeable material, having a space of a circular truncated cone or a truncated pyramid opened at both axial end sides in its inside, to be used in this apparatus.

REFERENCES:
patent: 3073210 (1963-01-01), Packard
patent: 4072427 (1978-02-01), Alsberg
patent: 4297032 (1981-10-01), Temple
patent: 4963018 (1990-10-01), West
patent: 5126872 (1992-06-01), Birkle
patent: 5298989 (1994-03-01), Tsukahara et al.
patent: 5661294 (1997-08-01), Buchmann et al.
patent: 5719677 (1998-02-01), Guerra

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