Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2007-07-12
2009-02-03
Lau, Tung S (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
C356S237200, C356S237500
Reexamination Certificate
active
07487049
ABSTRACT:
When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.
REFERENCES:
patent: 5037202 (1991-08-01), Batchelder et al.
patent: 5469259 (1995-11-01), Golby et al.
patent: 5798829 (1998-08-01), Vaez-Iravani
Hitachi High-Technologies Corporation
Lau Tung S
McDermott Will & Emery LLP
Vo Hien X
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