Surface inspection method and device with irradiation

Details Surface inspection method and device with irradiation Surface inspection method and device with irradiation

1992-11-25

1994-07-19

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

2503581, 356237, G01N 2188, G01N 2155, G01B 1130

Patent

active

053311698

ABSTRACT:
An inspection method including the steps of irradiating a light with a predetermined changing pattern onto a substantially specular surface to be inspected through an irradiation device facing the surface, forming an image based on reflected light in correspondence with the predetermined changing pattern by an imaging device, and utilizing reflected light of only 200-350 nm wavelength to form the image so as to detect a flaw in the surface by identifying points which differ from the changing pattern of the irradiation device. The flaws in the coating can be detected with a high accuracy irrespective of the color of the coating surface. An inspection device is also provided for the same object.

REFERENCES:
patent: 4629319 (1986-12-01), Clarke et al.
patent: 5041726 (1991-08-01), Chang et al.
patent: 5072128 (1991-12-01), Hayano et al.
patent: 5153445 (1992-10-01), Stapleton
patent: 5208766 (1993-05-01), Chang et al.

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