Surface inspection method and apparatus

Details Surface inspection method and apparatus Surface inspection method and apparatus

1996-12-04

1998-04-07

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356371, G01N 2100

Patent

active

057370745

ABSTRACT:
The method comprises the steps of: irradiating an objective region to be measured with an illuminating light in an oblique direction thereto; forming an image of reflected light from the objective region by member of an object-side telecentric optical system or an image-object-side telecentric optical system, which has an optical axis coinciding with an incident direction of the illuminating light to the objective region and has a object-side angular aperture against a point on the objective region, which is set at a predetermined angle; picking up the formed image to collect luminance data of respective points in the objective region; and processing the luminance data to recognize bright and dark portions and thereby determining the presence or absence of an irregular portion and a shape of the irregular portion, in the objective region. The method enables measurement of the presence or absence of irregularity and the shape of the irregularity in a wide surface region with a high accuracy and in a single operation by using an apparatus having relatively simple construction.

REFERENCES:
patent: 3484150 (1969-12-01), Taoka et al.
patent: 3782827 (1974-01-01), Nisenson et al.
patent: 3815998 (1974-06-01), Tietze
patent: 4547073 (1985-10-01), Kugimiya
patent: 4818108 (1989-04-01), Eppinger
patent: 5461228 (1995-10-01), Kirkman et al.

Affiliated with

Also associated with

Rating

Surface inspection method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface inspection method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface inspection method and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-17876