Surface inspection by amplitude modulated specular light...

Dynamic information storage or retrieval – Condition indicating – monitoring – or testing – Including radiation storage or retrieval

Reexamination Certificate

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C356S237200

Reexamination Certificate

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07623427

ABSTRACT:
An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. The first light beam portion illuminates the surface of the disk and produces a reflected light beam. An acoustic-optic deflector deflects the reflected light beam and the second light beam portion producing a deflected output beam having a deflection angle. A detector detects an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam.

REFERENCES:
patent: 6529270 (2003-03-01), Bills
patent: 7315365 (2008-01-01), Chen et al.
A. Vanderlugt & A.M. Bardos;Design Relationships for Acousto-Optic Scanning Systems; Applied Optics; vol. 31, No. 20, Jul. 10, 1992.

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