Surface inspection apparatus using a mask system to monitor unev

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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Details

250223B, 356240, G01N 2188

Patent

active

048684040

ABSTRACT:
A surface inspection apparatuses having a light source for irradiating an uneven surface of an object to be inspected, a photoelectric conversion sensor for picking up the uneven surface of the object and generating a video signal thereof, and an electronic processor for processing the video signal to inspect the surface of the object, in which an optical mask is located in front of the light source so as to restrict the passage of the light from the light source with a predetermined pattern, whereby the irregular light reflection of the light from the light source, which passed through the optical mask, on the uneven surface becomes substantially uniform.

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