Surface inspection apparatus and surface inspection head...

Optics: measuring and testing – Inspection of flaws or impurities – Bore inspection

Reexamination Certificate

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Details

C356S237100

Reexamination Certificate

active

07602487

ABSTRACT:
A surface inspection apparatus has a detection unit that irradiates an inner circumferential surface of an inspection object with inspection light from a laser diode through a light projecting fiber, and detects the intensity of the reflected light of that inspection light. The detection unit comprises a first light receiving fiber group, which is disposed at the circumference of the light projecting fiber, a second light receiving fiber group, which is disposed further on the outer side thereof, and photodetectors, which are connected to each of the fiber groups.

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