Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-07-10
2007-07-10
Glick, Edward J. (Department: 2882)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559400
Reexamination Certificate
active
11104621
ABSTRACT:
A surface inspection apparatus and a method for inspecting the surface of a sample are capable of inspecting discriminatingly between scratches of various configuration and adhered foreign objects that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to a polishing process such as CMP or a grinding process, in semiconductor manufacturing process or magnetic head manufacturing process. In the invention, the scratch and foreign object that occur on the polished or ground surface of the sample is epi-illuminated and slant-illuminated by use of approximately same light flux, the difference between the scattered light intensity from the shallow scratch and from the foreign object is applied to thereby discriminate between the shallow scratch and the foreign object, and the directionality of the scattered light is detected to discriminate between the linear scratch and the foreign object.
REFERENCES:
patent: 4449818 (1984-05-01), Yamaguchi et al.
patent: 4889998 (1989-12-01), Hayano et al.
patent: 5712701 (1998-01-01), Clementi et al.
patent: 5903342 (1999-05-01), Yatsugake et al.
patent: 6894302 (2005-05-01), Ishimaru et al.
patent: 2002/0036771 (2002-03-01), Sato et al.
patent: 2002/0041374 (2002-04-01), Ohshima et al.
patent: 57-013340 (1982-01-01), None
patent: 57-132044 (1982-08-01), None
patent: 03-102248 (1991-04-01), None
patent: 03-102249 (1991-04-01), None
patent: 08-327326 (1996-12-01), None
patent: 09-304289 (1997-11-01), None
patent: 11-064234 (1999-03-01), None
patent: 11-142127 (1999-05-01), None
patent: 11-160245 (1999-06-01), None
patent: 97/35162 (1997-09-01), None
Ishimaru Ichiro
Kenbou Yukio
Moriyama Ichiro
Noguchi Minori
Tanabe Yoshikazu
Antonelli, Terry Stout & Kraus, LLP.
Glick Edward J.
Hitachi , Ltd.
Hitachi High-Technologies Corporation
Song Hoon
LandOfFree
Surface inspection apparatus and method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface inspection apparatus and method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface inspection apparatus and method thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3750803