Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2011-05-31
2011-05-31
Song, Hoon (Department: 2882)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C356S237200
Reexamination Certificate
active
07952085
ABSTRACT:
The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process.
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Ishimaru Ichiro
Kenbou Yukio
Moriyama Ichiro
Noguchi Minori
Tanabe Yoshikazu
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Hitachi High-Technologies Corporation
Song Hoon
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