Surface inspection apparatus

Details Surface inspection apparatus Surface inspection apparatus

2008-03-25

2008-03-25

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C356S237100

Reexamination Certificate

active

07348585

ABSTRACT:
A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.

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patent: 2002/0180959 (2002-12-01), Nakajima et al.
patent: 2003/0020917 (2003-01-01), Mundt et al.
patent: 2004/0042001 (2004-03-01), Vaez-Iravani et al.
patent: 2004/0061851 (2004-04-01), Isozaki et al.
patent: 11-153549 (1999-06-01), None

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