Surface inspection apparatus

Details Surface inspection apparatus Surface inspection apparatus

1984-12-18

1988-09-20

Rosenberger, R. A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356336, G01N 2100

Patent

active

047721278

ABSTRACT:
In the surface inspection apparatus disclosed herein, an elongate array of electro-optical shutters is interposed between a laser beam which scans across the surface to be inspected and a photodetector system which collects light scattered from the surface along the scan line. The shutters are operated in a shifting pattern in synchronism with the scanning means thereby to block unwanted regular signal components.

REFERENCES:
patent: 3654846 (1972-04-01), Wernikoff et al.
patent: 4402607 (1983-09-01), McVay et al.
patent: 4415265 (1983-11-01), Campillo et al.

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