Surface inspection apparatus

Optics: measuring and testing – By particle light scattering – With photocell detection

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356360, G01B 9021

Patent

active

046965726

ABSTRACT:
A surface inspection apparatus for inspecting the condition of a nonspherical subject surface includes a laser generator and a computer hologram. The laser beam emitted from the laser generator is divided by a light dividing unit into an object light directed toward the subject surface and a reference light directed toward the hologram. The object light is applied to the subject surface and then projected onto the hologram. The zeroth-order diffracted rays of the reference light passed through the hologram and the negative first-order diffracted rays of the object light passed through the hologram are caused to interface with each other, thereby producing interference fringes.

REFERENCES:
patent: 3642374 (1972-02-01), Matsumoto et al.
Snow et al. "On Using Holograms for Test Glasses", Applied Optics vol. 9, No. 4, pp. 822-827, 4/70.
Birch et al. "The Application of Computer-generated Holograms to Testing Optical Elements", J. Phys. D. Appl. Phys., vol. 5, pp. 1982-1992, 11/72.
Larionov et al., "Holographic Inspection of Aspherical Surfaces", Sov. J. Opt. Technol., vol. 46, pp. 229-231, 4/79.
Wyant et al., "Using Computer Generated Holograms to Test Aspheric Wavefronts", Applied Optics, vol. 11, No. 12, pp. 2833-2839, 12/72.
Ichioka et al., "Interferometric Testing of Large Optical Components with Circular Computer Holograms", Applied Optics, vol. 11, No. 11, pp. 2597-2602, 11/72.
Yatagai et al., "Interferometric Testing with Computer-generated Holograms: Aberration Balancing Method and Error Analysis", Applied Optics, vol. 17, No. 4, pp. 558-565, 2/78.

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