Surface inspection apparatus

Details Surface inspection apparatus Surface inspection apparatus

1987-11-12

1989-05-09

Britton, Howard W.

Facsimile and static presentation processing

Static presentation processing

Attribute control

358106, 358227, H04N 718

Patent

active

048293741

ABSTRACT:
A surface inspection apparatus having a microscope and a television camera is disclosed. The inspection apparatus samples a signal portion from a horizontal scanning portions of the video signal produced by the television camera, compares the instantaneous voltages of a filtered signal of said sampled portion removing low-frequency components with a reference voltage, counts the number of pulses constituted from the high level portions of said filtered signal higher than said reference voltage sequentially moves the focal point of the microscope step by step relative to the object surface, compares the present pulse count with the previous pulse count thereof at just prior step of the moving of the focal point, and decides the focal point in the position corresponding to the maximum number of pulses to control the moving of the focal point for correctly setting the focal point in said corresponding position.

REFERENCES:
patent: 3835247 (1974-09-01), Soames
patent: 3886305 (1975-05-01), Yew et al.
patent: 3887764 (1975-06-01), Gibbons et al.
patent: 4186301 (1980-01-01), Basire et al.
patent: 4543602 (1985-09-01), Kai et al.
patent: 4713687 (1987-12-01), Shimizu et al.

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