Surface inspecting apparatus and method

Details Surface inspecting apparatus and method Surface inspecting apparatus and method

2005-01-25

2005-01-25

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

06847444

ABSTRACT:
A surface inspection apparatus includes a light source section for emitting a first and a second luminous flux; a first and a second irradiation optical system in which the first and the second luminous flux are irradiated on the surface of an inspected object at a first and a second irradiation angle, respectively; a displacement section for relatively displacing an inspected object and an irradiation luminous flux of the irradiation optical system; a light receiving optical system for receiving scattered light of the first and the second luminous flux; a first and a second light receiving section for converting scattered light of the first and second luminous flux into a first and a second light receiving signal, respectively; and a signal forming section for forming a measuring signal on the basis of the first and the second light receiving signal. The first and the second light receiving section form a first and a second light receiving signal which are different in sensitivity or dynamic range from each other, and synthesizes the first and the second light receiving signal to form a measuring signal.

REFERENCES:
patent: 5436464 (1995-07-01), Hayano et al.
patent: 5748305 (1998-05-01), Shimono et al.
patent: 6104481 (2000-08-01), Sekine et al.
patent: 6169601 (2001-01-01), Eremin et al.
patent: 6191849 (2001-02-01), Maeshima et al.

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