Surface inspecting apparatus

Details Surface inspecting apparatus Surface inspecting apparatus

2007-03-13

2007-03-13

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

Sample, specimen, or standard holder or support

Reexamination Certificate

active

10693695

ABSTRACT:
A surface inspection apparatus for inspecting a shape of an inspected surface of an object to be inspected includes: a supporting unit capable of supporting the object in a state in which the inspected surface is in a substantially vertical state; and a moving state which moves the object in a substantially vertical direction while the inspected surface is maintained in the substantially vertical state.

REFERENCES:
patent: 4684021 (1987-08-01), Niebling et al.
patent: 5511005 (1996-04-01), Abbe et al.
patent: 6242926 (2001-06-01), Gardopee et al.
patent: 6606154 (2003-08-01), Oda
patent: 6844929 (2005-01-01), Glenn et al.
patent: 02-087006 (1990-03-01), None
patent: 10-062136 (1998-03-01), None
patent: 10-221033 (1998-08-01), None

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