Surface inspecting apparatus

Details Surface inspecting apparatus Surface inspecting apparatus

1998-08-28

1999-10-05

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

3562372, G01B 1130

Patent

active

059633280

ABSTRACT:
A surface inspecting apparatus includes linear light sources 11, 13 for emitting illumination light toward a surface of a body panel 10 to be inspected, CCD cameras 12, 14 for imaging the surface and forming its illuminated images on the basis of reflection light from the surface, and an inspecting unit for detecting a defect existing on the surface on a basis of the illuminated image and outputting detected information about the defect. In the arrangement, the sources 11, 13 are arranged so as to obliquely emit the illumination light toward the surface at incident angles .alpha. from 80 to 90 degrees. While, the cameras 12, 14 are arranged so as to receive diffused reflection light of the illumination light reflected by the surface at reflection angles .beta. each smaller than the incident angle .alpha..

REFERENCES:
patent: 5086232 (1992-02-01), Maguire et al.
patent: 5606410 (1997-02-01), Peclier et al.

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