Abrasive tool making process – material – or composition – With carbohydrate or reaction product thereof
Patent
1987-12-07
1991-07-30
Rose, Robert A.
Abrasive tool making process, material, or composition
With carbohydrate or reaction product thereof
5116577, 511313, 511658, B24B 722
Patent
active
050350870
ABSTRACT:
A surface grinding machine comprises a wheel head vertically movably supported; a cup-shaped diamond wheel supported by a rotatable wheel shaft at one end of the wheel head and having an abrasive grain layer of Young's modulus (10-15).times.10.sup.4 kgf/cm.sup.2 at the lower end of the wheel; a wheel shaft driving motor for rotating the cup-shaped diamond wheel supported by the wheel head; a servomotor for vertically moving the wheel head; a suitable number of chuck tables for fixing the surface of a III-V group compound semiconductor wafer on which elements have been fabricated; an index table for rotatably supporting the chuck tables; a chuck table driving motor for turning the chuck tables; a main shaft motor current analysis circuit for detecting the current value of the wheel shaft driving motor; a main shaft rotation number analysis circuit for detecting the number of rotations of the wheel shaft driving motor, and a feed speed control circuit for controlling the serevomotor in such a manner as to decrease the feed speed when the grinding resistance is greater than a predetermined resistance value, and increase the feed speed when the grinding resistance is smaller than the predetermined resistance value.
REFERENCES:
patent: 3698138 (1972-10-01), Wada et al.
patent: 3939610 (1976-02-01), Suzuki et al.
patent: 4239503 (1980-12-01), Harris et al.
patent: 4478009 (1984-10-01), Rukavina et al.
patent: 4561863 (1985-12-01), Hashimoto
patent: 4575384 (1986-03-01), Licht et al.
Manufacturing Engineering, Sep. 1977, pp. 38-45; C. Wick, "Automatic Adaptative Control of Machine Tools," p. 41.
Patent Abstracts of Japan, vol. I), No. 273 (M-518) (2329); and Japan A-61-95866 (Nisshin Kogyo) 14-05-1986 (Cat. D.A.).
Miyoshi Ikkei
Nishiguchi Masanori
Nishio Kiyoshi
Sekiguchi Takeshi
Asahi Diamond Industrial Co. Ltd.
Nissei Industry Corporation
Rose Robert A.
Sumitomo Electric Industries Ltd.
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