Surface gratings and a method of increasing their spatial freque

Details Surface gratings and a method of increasing their spatial freque Surface gratings and a method of increasing their spatial freque

1981-02-06

1982-03-23

Hoffman, James R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 10, 427160, 427162, G21K 300, B05D 306

Patent

active

043212824

ABSTRACT:
A method is described for increasing the spatial frequency of surface relief structures. Periods as small as 750 Angstroms have been made.

REFERENCES:
patent: 4287235 (1981-09-01), Flanders
Shank et al., "Optical Technique for Producing 0.1.mu. Periodic Surface Structures", Applied Physics Letters, vol. 23, No. 3, pp. 154-155. Aug. 1973.
Johnson et al., "An Oblique Shadow Deposition Technique for Altering the Profile of Grating Relief Patterns on Surfaces", Applied Physics Letters, vol. 34, No. 9, pp. 578-580, May 1979.
Flanders et al., "Spatial Period Division-A New Technique for Exposing Submicrometer-Linewidth Periodic and Quasiperiodic Patterns", J. Vac. Sci. Technol., vol. 16, No. 6, pp. 1949-1952, Nov./Dec. 1979.
Johnson et al., "Interference Gratings Blazed by Ion-Beam Erosion", Applied Physics Letters, vol. 35, No. 7, pp. 500-503, Oct. 1979.

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