Surface foreign matter inspecting device

Details Surface foreign matter inspecting device Surface foreign matter inspecting device

2006-05-16

2006-05-16

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500

Reexamination Certificate

active

07046354

ABSTRACT:
A surface foreign matter inspection device is provided with which the NA can be enlarged with a simple configuration, and a shortening of the time required for foreign matter inspection as well as a high detection sensitivity can be achieved. The device is provided with an optical detection means6that irradiates light from an radiation optical system onto the surface of an object under inspection on a stage, reflects light scattered by foreign matter on the object under inspection and turns the reflected light into parallel light, condenses the parallel light with a condensing lens, and detects the condensed light, as well as an information processing device100for processing an electrical signal from the optical detection means6and position information regarding the foreign matter on the object under inspection4.

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