Surface-emitting laser diode and method of manufacturing the...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S050124

Reexamination Certificate

active

07920615

ABSTRACT:
A surface-emitting laser diode capable of being manufactured easily at low cost, and capable of stabilizing the polarization direction of laser light in one direction and achieving higher output is provided. A light emission section20in which a lower first DBR mirror layer12, a lower second DBR mirror layer13, a lower spacer layer14, an active layer15including a light emission region15A, an upper spacer layer16, a current confinement layer17, an upper DBR mirror layer18and a contact layer19are laminated in this order is included on a substrate10. The lower first DBR mirror layer12includes an oxidation section30nonuniformly distributed in a direction rotating around the light emission region15A in a periphery of a region corresponding to the light emission region15A. The oxidation section30includes a pair of multilayer films31and32, and is formed by oxidizing a low refractive index layer12A. Thereby, an anisotropic stress according to nonuniform distributions of the multilayer films31and32is generated in the active layer15.

REFERENCES:
patent: 2000-261094 (2000-09-01), None
patent: 2001-024277 (2001-01-01), None
patent: 2003-298186 (2003-10-01), None
patent: 2005-044964 (2005-02-01), None
patent: 2005-142361 (2005-06-01), None
patent: 2006-210429 (2006-08-01), None
International Search Report; International Application No. PCT/JP2007/061281; Dated: Aug. 14, 2007.

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