Surface emitting laser and method of manufacturing the same

Coherent light generators – Particular active media – Semiconductor

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372 46, 372 96, 437129, H01S 319

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active

053735200

ABSTRACT:
A current constriction layer surrounding a vertical-cavity region is formed in a cladding layer of a surface emitting laser. The forbidden band width of the material forming this current constriction layer is wider than the forbidden band width of a material forming the cladding layer. Further, the current constriction layer and the cladding layer are formed of semiconductors, and conduction types thereof are different from each other. Further, the upper surface of the cladding layer covering the current constriction layer has a step in the periphery of vertical-cavity region.

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Journal of Applied Physics, vol. 69, No. 11, Jun. 1, 1991, New York, US, pp. 7430-7434, C. Lei et al., `ZnSe/CaF2 Quarter-Wave Bragg Reflector for the Vertical-Cavity Surface-Emitting Laser`.
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"Submilliamp Threshold Vertical-Cavity Laser Diodes," R. Geels et al., Applied Physics Letters 57 (16), Oct. 15, 1990, pp. 1605-1607.
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