Coherent light generators – Particular resonant cavity – Distributed feedback
Patent
1995-12-08
1997-12-30
Bovernick, Rodney B.
Coherent light generators
Particular resonant cavity
Distributed feedback
372 99, 372 45, 372 46, 437129, H01S 308, H01S 319, H01L 2120
Patent
active
057038988
ABSTRACT:
A surface emission laser is formed by sequentially stacking an n-type semiconductor multilayer reflector, an n-type clad layer, an active layer, a p-type clad layer, and a p-type semiconductor multilayer reflector on a semiconductor substrate. The p-type semiconductor multilayer reflector is etched to form a mesa. An electrode is formed on at least on the mesa side surfaces and a portion of the mesa bottom surface. The thickness of a GaAs film as the mesa bottom surface of the p-type semiconductor multilayer reflector to which an etching process is stopped is set to be (1/4+n/2, where n is an integer) times the oscillation wavelength. A method of manufacturing the surface emission laser is also disclosed.
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Bovernick Rodney B.
NEC Corporation
Phan Luong-Quyen T.
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