Surface elastic wave element

Details Surface elastic wave element Surface elastic wave element

1982-03-03

1984-05-15

Nussbaum, Marvin L.

Wave transmission lines and networks

Coupling networks

Delay lines including elastic surface wave propagation means

310313A, 333154, 333193, H03H 9145, H03H 925, H03H 942

Patent

active

044491077

ABSTRACT:
A surface elastic wave element comprising a (110)-oriented silicon substrate, a zinc oxide layer formed on the silicon substrate and electrodes formed on the zinc oxide layer so as to propagate surface elastic wave to the [001]-axis direction of the zinc oxide layer.

REFERENCES:
patent: 3786373 (1974-01-01), Schulz et al.
patent: 3828283 (1974-08-01), Daniel
patent: 4037176 (1977-07-01), Ono et al.
patent: 4038615 (1977-07-01), Ishiyama et al.
patent: 4194171 (1980-03-01), Jelks
patent: 4354130 (1982-10-01), Ono et al.
patent: 4358745 (1982-11-01), Keyes

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