Surface detect test apparatus

Details Surface detect test apparatus Surface detect test apparatus

1977-12-09

1979-07-24

Clark, Conrad J.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250563, 250572, 356430, 356446, G01N 2148

Patent

active

041621263

ABSTRACT:
Apparatus and method for testing surface defect on an object are disclosed, which comprise an illumination means for illuminating collimated lights onto a surface of the object obliquely to the surface and from two symmetrical directions, a sensor composed of a TV camera or a linear image sensor for sensing diffused reflected lights from the surface of the object in the direction perpendicular to the surface, a classification means for discriminating the sensed image signal by a threshold level which is higher than an average level of the image signal and a threshold level which is lower than the average level to determine the surface defect pattern as a broken cavity pattern or a pit or crack pattern by the discriminated signals, and a discrimination means for calculating L.sup.2 -4.pi.S, where S is an area of the defect and L is a length of the contour, when signal discriminated by the lower threshold level is produced to discriminate the pit pattern and the crack pattern by determining whether L.sup.2 -4.pi.S exceeds a predetermined value or not. In this manner, the defects that exist on the surface of the object can be classified and evaluated.

REFERENCES:
patent: 3782836 (1974-01-01), Fey et al.
Sommer et al., "Detection and Measurement of Epitaxial Spikes", IBM Technical Disclosure Bulletin, vol. 13, No. 11, p. 3496, Apr. 1971.

Affiliated with

Also associated with

Rating

Surface detect test apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface detect test apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface detect test apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1286476