Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2010-03-19
2011-10-11
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C250S559450
Reexamination Certificate
active
08035808
ABSTRACT:
A surface defect inspection apparatus and method for irradiating a beam multiple times to a same region on a surface of an inspection sample, detecting each scattered light from the same region by detection optical systems individually to produce plural signals, and wherein irradiating the beam includes performing a line illumination of the beam on a line illumination region of the sample surface. The line illumination region is moved in a longitudinal direction at a pitch shorter than a length of the line illumination region in the longitudinal direction.
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Matsui Shigeru
Nakao Toshiyuki
Oshima Yoshimasa
Antonelli, Terry Stout & Kraus, LLP.
Chowdhury Tarifur
Hitachi High-Technologies Corporation
Stock, Jr. Gordon
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