Surface defect inspection apparatus and surface defect...

Details Surface defect inspection apparatus and surface defect... Surface defect inspection apparatus and surface defect...

2008-05-13

2008-05-13

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Reexamination Certificate

active

07372557

ABSTRACT:
The present invention aims to provide a surface defect inspection apparatus and a surface defect inspection method for properly inspecting for a concave-shaped flaw (or a part thereof) substantially in parallel with a plane of incidence. The apparatus includes an illumination unit10illuminating a front surface (surface under inspection5a) of an object to be inspected5with illumination light for inspection, a changing unit1, 33which relatively rotating the object to be inspected and the illumination unit around an axis AX1perpendicular to the surface under inspection5aand changing illumination conditions of the illumination light, a light reception unit20receiving scattered light emitted from the surface under inspection when illuminated with illumination light in each illumination condition, to capture images thereof, and a combining unit32combining images captured by the light reception unit to generate a combined image.

REFERENCES:
patent: 5764363 (1998-06-01), Ooki et al.
patent: 6512578 (2003-01-01), Komatsu et al.
patent: A 2003-28621 (2003-01-01), None

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