Surface defect inspecting method and device

Details Surface defect inspecting method and device Surface defect inspecting method and device

2004-10-20

2009-10-06

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237600, C356S603000, C356S606000

Reexamination Certificate

active

07599050

ABSTRACT:
A method of inspecting an inspection target surface comprises: irradiating an irradiation light having a predetermined pattern on the inspection target surface; imaging the surface irradiated with the irradiation light; and inspecting the inspection target surface based on an obtained image of the inspection target surface. The irradiation light irradiated from an irradiation face has a mesh-like pattern including meshes of a same shape. Each mesh has an irradiation area smaller than a non-irradiation area in a plane normal to the optical axis. The inspection target surface is inspected based on lightness/darkness information of an image area in the obtained image corresponding to a non-irradiated area in the inspection target surface. A light point having intermediate brightness and formed in a dark face formed within the mesh is extracted as a defect candidate.

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