Surface defect inspecting apparatus

Details Surface defect inspecting apparatus Surface defect inspecting apparatus

1984-11-26

1986-12-02

Willis, Davis L.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250563, 356236, G01N 2189

Patent

active

046261010

ABSTRACT:
The holding mechanism holds an object under inspection in a manner that the substantially entire surface of the object may relatively be scanned by a laser beam. A spherical integrating light collector has an opening disposed close to the inspected surface of the object held by the holding mechanism. A laser beam illuminating mechanism is coupled with the other end of the spherical integrating light collector, and illuminates the inspected surface of the object with the laser beam through the opening. A photo-electric converter receives the scattered light as is reflected by the inspected surface and collected by the spherical integrating light collector, and converts the scattered light into an electrical signal representing an amount of light. An analog to digital converter converts the electrical signal derived from the photo-electric converter into a digital signal. A peak detector receives the digital signal derived from the analog to digital converter to detect peak values at predetermined periods. A mean value calculator calculates a mean value using a digital signal output from the analog to digital converter. A reference value storing memory stores a reference value to determine defects present on the inspected surface of the object. A threshold level calculator calculates the threshold level using the reference value and the mean value. A defect detector compares peak values derived from the peak detector with the threshold level, and detects the surface defects on the basis of the result of the comparison.

REFERENCES:
patent: 4360275 (1982-11-01), Louderback
patent: 4376583 (1983-03-01), Alford et al.
patent: 4378159 (1983-03-01), Galbraith
patent: 4391524 (1983-07-01), Steigmeier et al.
patent: 4428672 (1984-01-01), Allard et al.
patent: 4441124 (1984-04-01), Heebner et al.

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