Surface defect detection and confirmation system and method

Details Surface defect detection and confirmation system and method Surface defect detection and confirmation system and method

1987-05-08

1988-12-27

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250572, 356237, 356446, C18

Patent

active

047942649

ABSTRACT:
A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal.

REFERENCES:
patent: 4172666 (1979-10-01), Clarke
patent: 4184082 (1980-01-01), Peoples
patent: 4492477 (1985-01-01), Leser
patent: 4583861 (1986-04-01), Yamaji et al.
patent: 4598997 (1986-07-01), Steigmeier et al.

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