Surface coordinate system

Optics: measuring and testing – Angle measuring or angular axial alignment – Sides of angle or axes being aligned transverse to optical...

Reexamination Certificate

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Reexamination Certificate

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07315360

ABSTRACT:
A method for creating a reference for a first position on a substrate edge. A first reference point is selected relative to a circumference of the substrate edge, and a second reference point is selected relative to a bevel of the substrate edge. A first distance along the circumference of the substrate edge between the first reference point and the first position is identified as a first coordinate, and a second distance along the bevel of the substrate edge between the second reference point and the first position is identified as a second coordinate. The first coordinate and the second coordinate are used as the reference for the first position.

REFERENCES:
patent: 5438209 (1995-08-01), Yamamoto et al.
patent: 6342705 (2002-01-01), Li et al.
patent: 6432800 (2002-08-01), Park
patent: 6906794 (2005-06-01), Tsuji

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