Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Patent
1998-08-07
2000-10-24
Hoff, Marc S.
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
702157, 702170, 356335, 356336, G01B 1500, G01B 1108, G01N 1502
Patent
active
061380830
ABSTRACT:
A light scattering Mueller matrix for an irregular particle placed on a plane interface is derived using the process of the present invention. The relationships discovered in this derivation are unique because they are independent of the particle shape, and only depend on the substrate refractive index (which is known), the wavelength and angle of incidence of the incident light (also known), and the approximate size of the scatterer (unknown). All that is required to estimate the size of the contaminant is to vary the scatterer size parameter until the model calculations of the light scattering Mueller matrix elements match the experimentally measured light scattering Mueller matrix elements. The probe of the present invention may be used as follows. First, the polarization state of the scattered light can be determined by measuring the Mueller matrix or Jones elements. Next, a "best fit" is made between these elements and the model. This "best fit" may be achieved via a merit function to weight out scattering regions, perhaps near-grazing scattering angles. Particle size is varied in the model until the fit is achieved.
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Barbee Manuel L.
Clohan, Jr. Paul S.
Hoff Marc S.
Kelly Mark D.
The United States of America as represented by the Secretary of
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