Surface condition measurement apparatus

Details Surface condition measurement apparatus Surface condition measurement apparatus

1984-05-10

1987-03-17

McGraw, Vincent P.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, G01B 902

Patent

active

046503307

ABSTRACT:
A surface condition measurement apparatus comprises a laser light source producing a light beam which is converted into two light beams of mutually different frequencies by an acousto-optical element, these light beams are split into two pairs directed in different directions with one pair serving to generate a beat-frequency signal used as a phase reference signal by heterodyne interference and the other pair being focussed onto a body surface to be reflected therefrom and with an electrical signal being generated from the reflected light as a beat-frequency signal, a phase difference between the latter signal and the reference signal being measured and processed to derive a difference in surface height between the surface points from which the light beam pair are reflected.

REFERENCES:
patent: 3523735 (1970-08-01), Taylor
Baronian "Acoustooptic Bragg Diffraction Devices and their Applications", IEEE' 74 Region Conference, pp. 70-77, 1974.
Sommarghen, "Optical Heterodyne Profilometry", Applied Optics vol. 20, No. 4, pp. 610-618, Feb. 1981.

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