Surface-condition inspection apparatus

Details Surface-condition inspection apparatus Surface-condition inspection apparatus

1995-06-07

1996-06-18

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356431, G01N 2188

Patent

active

055283608

ABSTRACT:
Beam scanning accompanying the rotation of a polygonal mirror for scanning is performed while projecting two light beams having different incident angles onto the polygonal mirror, and simultaneously illuminating positions having the same shape on patterns having the same shape on a reticle by two light beams reflected by the polygonal mirror. Light beams from the respective irradiated points are separately detected and compared with each other, whereby the presence of a foreign particle or the like is inspected. The interval between the irradiated points is changed by the function of an actuator in order to deal with changes and errors in the distance between patterns on different reticles.

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