Surface cleaning with argon

Details Surface cleaning with argon Surface cleaning with argon

1994-01-21

1996-04-30

Lacey, David L.

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 2, 134 21, 451 39, 451 40, B08B 700

Patent

active

055121063

ABSTRACT:
Argon gas and nitrogen gas are mixed together and cooled by a cooler to a liquefying temperature of argon gas specific to its pressure, to form argon fine droplets in the mixed gas. The gas is then jetted out of nozzles and blown into a vacuum chamber to adiabatically lower the temperature further and change fine droplets to solid fine particles which are used to clean the surface of an object.

REFERENCES:
patent: 5062898 (1991-11-01), McDermott et al.
patent: 5209028 (1993-05-01), McDermott et al.
patent: 5294261 (1994-03-01), McDermott et al.
patent: 5366156 (1994-11-01), Bauer et al.
patent: 5377911 (1995-01-01), Bauer et al.
patent: 5378312 (1995-01-01), Gifford et al.
patent: 5400603 (1995-03-01), Bauer et al.

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