Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1992-11-02
1994-03-15
Breneman, R. Bruce
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
B08B 500
Patent
active
052942619
ABSTRACT:
A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon or nitrogen particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
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patent: 5062898 (1991-11-01), McDermott et al.
Airco Special Gases "Spectra-Clean.RTM. CO.sub.2 " brochure Jul. 1, 1987.
Chemical Processing; Nov. 1989; p. 54.
Semi-conductor International; Nov. 1989; p. 16; Mitsubishis LSI Research and Development Laboratory.
Abstract No. 377; "Ultra Clean Ice Scrubber with Jetting Fine Ice Particles"; Ohmuri, et al., Aug., 1989.
Hoenig, et al; "Cleaning Surfaces with Dry Ice"; Compressed Air Magazine; Aug. 1986; pp. 22-24.
Hoenig, et al; "Control of Particulate Contamination by Thermophoresis . . . "; Ninth ICCC8 Processed 1988; Inst. of Env. Sci.; pp. 671-678.
Cooper Douglas W.
McDermott Wayne T.
Ockovic Richard C.
Schwarz Alexander
Wolfe Henry L.
Air Products and Chemicals Inc.
Breneman R. Bruce
Chase Geoffrey L.
Dunn Jr. Thomas G.
International Business Machines - Corporation
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