Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1990-06-05
1991-11-05
Pal, Asok
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
B08B 500
Patent
active
050628984
ABSTRACT:
A method is disclosed for cleaning microelectronics surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
REFERENCES:
patent: 4806171 (1989-02-01), Whitlock et al.
Airco Special Gases "Spectra-Clean.RTM. CO.sub.2 " brochure.
Chemical Processing; Nov. 1989, p. 54.
Semiconductor International; Nov. 1989; p. 16; Mitsubishi's LSI Research and Development Laboratory.
Abstract No. 377; "Ultraclean Ice Scrubber with Jetting Fine Ice Particles"; T. Ohmori, T. Fukumutu, T. Kato.
S. A. Hoenig; "Cleaning Surfaces with Dry Ice"; Compressive Air Magazine; Aug. 1986; pp. 22-24.
S. A. Hoenig, et al.; "Control of Particulate Contamination by Thermophoresis, Electrostatics, and Dry Ice Techniques"; Ninth ICCCS Proceedings 1988 Institute of Environmental Sciences; pp. 671-678.
Cooper Douglas W.
McDermott Wayne T.
Ockovic Richard C.
Schwarz Alexander
Wolfe Henry L.
Air Products and Chemicals Inc.
Chase Geoffrey L.
International Business Machines - Corporation
Marsh William F.
Pal Asok
LandOfFree
Surface cleaning using a cryogenic aerosol does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface cleaning using a cryogenic aerosol, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface cleaning using a cryogenic aerosol will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-496513