Surface characteristic analysis apparatus

Details Surface characteristic analysis apparatus Surface characteristic analysis apparatus

2005-09-20

2008-03-04

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07337656

ABSTRACT:
In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface analysis apparatus for semiconductor devices etc. provided with a function for enabling positioning to be performed in such a manner that there is no influence on measurement in electrical measurements at an extremely small region using this microscopic multi-tip probe, and there are provided the steps of making a cantilever1formed with a plurality of electrodes3using lithographic techniques, and forming microscopic electrodes6minute in pitch by sputtering or gas-assisted etching a distal end of the cantilever1using a focused charged particle beam or using CVD.

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