Surface characteristic analysis

Details Surface characteristic analysis Surface characteristic analysis

2007-01-26

2009-06-30

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300, C356S237400, C356S237500, C356S237600, C356S237100

Reexamination Certificate

active

07554654

ABSTRACT:
In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface and a surface profile height measuring tool to measure one or more characteristics of the surface in the defect region with a surface profile height measuring tool.

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