Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1997-01-31
1998-06-16
Brown, Glenn W.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324663, 324686, G01R 2726
Patent
active
057676879
ABSTRACT:
Vapor-deposition polymerization films serve as vapor-sensitive dielectrics (130, 530) over surface-type capacitive electrodes (110 and 120, 510 and 520), or as protective layers (140, 142) over vapor-sensitive dielectrics (132) or flux-concentrators (150) in surface-type capacitive-electrode vapor sensors. Arrays of sensors (411-422) with different vapor-deposition polymerization films provide selectivity among different vapor species. Vapor-sensitive films (530) covering surface-type capacitive electrodes (510, 520) cointegrated with heater elements (560, 570) on thermally isolated suspended substrates (500) provide selectivity among different vapor species.
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