Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2008-07-08
2008-07-08
Mack, Ricky L (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
Reexamination Certificate
active
11437776
ABSTRACT:
A sensor comprises an optical modulator that generates a modulation signal, an interferometer that mixes an acoustic signal evoked by a pulsed laser with the modulation signal to down-convert the acoustic signal to lower frequencies, and a photodetector that detects the down-converted signal.
REFERENCES:
patent: 4448525 (1984-05-01), Mikoshiba et al.
patent: 4572949 (1986-02-01), Bowers et al.
patent: 4874251 (1989-10-01), Thomas et al.
patent: 5083869 (1992-01-01), Nakata et al.
patent: 5136172 (1992-08-01), Nakata et al.
patent: 5706094 (1998-01-01), Maris
patent: 6008906 (1999-12-01), Maris
patent: 6211961 (2001-04-01), Maris
patent: 6216540 (2001-04-01), Nelson et al.
patent: 6268916 (2001-07-01), Lee et al.
patent: 6411390 (2002-06-01), Nikoonahad et al.
patent: 6504618 (2003-01-01), Morath et al.
patent: 6552803 (2003-04-01), Wang et al.
patent: 6786099 (2004-09-01), Janik
patent: 6806951 (2004-10-01), Wack et al.
patent: 6818459 (2004-11-01), Wack et al.
patent: 6829559 (2004-12-01), Bullman et al.
patent: 6891610 (2005-05-01), Nikoonahad et al.
patent: 6891627 (2005-05-01), Levy et al.
patent: 6917419 (2005-07-01), Fielden et al.
patent: 6919957 (2005-07-01), Nikoonahad et al.
patent: 6937340 (2005-08-01), Roudil et al.
patent: 6946394 (2005-09-01), Fielden et al.
patent: 6950196 (2005-09-01), Fielden et al.
patent: 6979292 (2005-12-01), Kanayama et al.
patent: 7006221 (2006-02-01), Wolf et al.
patent: 7006235 (2006-02-01), Levy et al.
R.M. Silver, et al., The Limits of Image-Based Oprical Metrology, Proc. SPIE vol. 6152, 61520Z, Metrology, Inspection, and Process Control for Microlithography XX; Chas N. Archie; Ed., Mar. 2006.
R.M. Silver et al., High-Resolution Optical Metrology, Proc. SPIE vol. 5752, p. 67-79, Metrology, Inspection, and Process Control for Microlithography XIX; Richard M. Sllver; Ed., May 2005.
Choi William C
Koestner Ken J.
Koestner Bertani LLP
Ler Technologies, Inc.
Mack Ricky L
LandOfFree
Surface and subsurface detection sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface and subsurface detection sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface and subsurface detection sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3938667