Surface and subsurface detection sensor

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

07397596

ABSTRACT:
A sensor comprises an optical modulator that generates a modulation signal, an interferometer that mixes an acoustic signal evoked by a pulsed laser with the modulation signal to down-convert the acoustic signal to lower frequencies, and a photodetector that detects the down-converted signal.

REFERENCES:
patent: 4448525 (1984-05-01), Mikoshiba et al.
patent: 4572949 (1986-02-01), Bowers et al.
patent: 4874251 (1989-10-01), Thomas et al.
patent: 5083869 (1992-01-01), Nakata et al.
patent: 5136172 (1992-08-01), Nakata et al.
patent: 5706094 (1998-01-01), Maris
patent: 6008906 (1999-12-01), Maris
patent: 6211961 (2001-04-01), Maris
patent: 6216540 (2001-04-01), Nelson et al.
patent: 6268916 (2001-07-01), Lee et al.
patent: 6411390 (2002-06-01), Nikoonahad et al.
patent: 6504618 (2003-01-01), Morath et al.
patent: 6552803 (2003-04-01), Wang et al.
patent: 6786099 (2004-09-01), Janik
patent: 6806951 (2004-10-01), Wack et al.
patent: 6818459 (2004-11-01), Wack et al.
patent: 6829559 (2004-12-01), Bullman et al.
patent: 6891610 (2005-05-01), Nikoonahad et al.
patent: 6891627 (2005-05-01), Levy et al.
patent: 6917419 (2005-07-01), Fielden et al.
patent: 6919957 (2005-07-01), Nikoonahad et al.
patent: 6937340 (2005-08-01), Roudil et al.
patent: 6946394 (2005-09-01), Fielden et al.
patent: 6950196 (2005-09-01), Fielden et al.
patent: 6979292 (2005-12-01), Kanayama et al.
patent: 7006221 (2006-02-01), Wolf et al.
patent: 7006235 (2006-02-01), Levy et al.
R.M. Silver, et al., The Limits of Image-Based Oprical Metrology, Proc. SPIE vol. 6152, 61520Z, Metrology, Inspection, and Process Control for Microlithography XX; Chas N. Archie; Ed., Mar. 2006.
R.M. Silver et al., High-Resolution Optical Metrology, Proc. SPIE vol. 5752, p. 67-79, Metrology, Inspection, and Process Control for Microlithography XIX; Richard M. Sllver; Ed., May 2005.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Surface and subsurface detection sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface and subsurface detection sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface and subsurface detection sensor will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2780120

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.