Surface analysis spectroscopy apparatus

Details Surface analysis spectroscopy apparatus Surface analysis spectroscopy apparatus

1986-05-21

1989-08-22

Lall, Parshotam S.

Boots, shoes, and leggings

250309, 250311, 2504411, 2504421, 2504431, G01N 2300

Patent

active

048602248

ABSTRACT:
In an apparatus for surface analysis microscopy, a number of analysis device are mounted on an ultra-high vacuum chamber. The devices include a beam source of locally heating a selected region of a specimen and a temperature-detector for monitoring the heating of the selected region, as well as an electron gun and an analyzer for detecting emission from a specimen region subjected to electron bombardment. An ion gun may also be provided. The apparatus enables thermal microscopy of a specimen to be carried out in conjunction with other surface analysis techniques including, inter alia, scanning electron microscopy and Auger electron microscopy, within a single apparatus and during a single experimental operation. A novel configuration of cylindrical mirror analyser facilitates mounting a multiplicity of analysis devices on the chamber in a compact manner for studying a specimen at a single position.

REFERENCES:
patent: 3878392 (1975-04-01), Yew et al.
patent: 3914606 (1975-10-01), Hashimoto et al.
patent: 3935453 (1976-01-01), Liebl
patent: 3949221 (1976-04-01), Liebl
patent: 4218617 (1980-08-01), Cazaux
patent: 4296323 (1981-10-01), Gerlach
patent: 4334844 (1982-06-01), Tanaka
patent: 4378701 (1983-04-01), Mountain et al.
patent: 4439049 (1984-03-01), Hoogendoorn et al.
patent: 4564758 (1986-01-01), Slodzian et al.
patent: 4567767 (1986-02-01), Quate et al.
patent: 4578584 (1986-03-01), Baumann et al.
patent: 4593196 (1986-06-01), Yates
patent: 4628468 (1986-12-01), Thompson et al.
patent: 4680467 (1987-07-01), Bryson, III et al.
patent: 4687930 (1987-08-01), Tamura et al.
patent: 4694170 (1987-09-01), Slodzian et al.
Chemical Analysis of Surfaces by Total-Reflection-Angle X-Ray Spectroscopy in RHEED Experiments (RHEED-TRAXS), Hasegawa, S.; Ino, S; Yamamoto, Y.; Daimon, M. Japanese Journal of Applied Physics, vol. 24, No. 6, Jun. 1985, pp. L387-L390.
Energy Spectra of Thermally Stimulated Exoelectrons from KCl:Tl X-Irradiated at 77K, Kamada, M.; Yoshiara, K.; Tsutsumi, K.; Japanese Journal of Applied Physics, vol. 23, Mar. 1984, pp. 286-290.
Reduction of the Bremsstrahlung Background in the Proton-Induced X-Ray Emission Analysis of Insulating Samples, Mingay, D. W.; Barnard, E., Nuclear Instruments & Methods, vol. 157, No. 3, (1978, 12).
Combined Ion, Electron, and X-Ray Beams for Studies of Surfaces and Thin Films, Musket, R. G., Nuclear Instruments and Methods, 144(1977), pp. 241-246.
An Ultrahigh Vacuum Electron Spectrometer for Surface Studies, Brundle, C. R.; Roberts, M. W., Journal of Electron Spectroscopy and Related Phenomena, 3(1974), pp. 241-261.
L'Imagerie Thermique Ou l'art et la Maniere de <<Voir les Temperatures>>, Dossiers Techniques Instrumentation, 2045 Electronique Industrielle, (1983), Auril, No. 50, Paris, France, (Translation Enc.).

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