Surface analysis method and apparatus

Details Surface analysis method and apparatus Surface analysis method and apparatus

1989-07-11

1992-08-11

Berman, Jack I.

Radiant energy

Electron energy analysis

250306, G01N 23227

Patent

active

051381583

ABSTRACT:
Described is a surface analysis method for analyzing energy of particles such as photoelectrons which are emitted from a sample surface by the irradiation of light with wavelengths ranging from the soft x-ray region to the vacuum ultraviolet region using an optical system including a reflective optical element to the sample surface so as to obtain chemical state information about the sample surface, wherein the beam diameter of the light on the sample surface is reduced to 1 .mu.m or less in terms of full width at half maximum of the beam intensity profile on the sample surface so that the chemical state information about the sample surface can be obtained with high sensitivity and high resolution, and an apparatus for implementing this method.

REFERENCES:
patent: 3567928 (1971-03-01), Davies et al.
patent: 3617741 (1971-11-01), Siegbahn et al.
patent: 3772522 (1973-11-01), Hammond et al.
patent: 3783280 (1974-01-01), Watson
patent: 4382181 (1983-05-01), Wang
patent: 4680467 (1987-07-01), Bryson, III et al.

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