Surface analysis apparatus and method using ion bombardment

Details Surface analysis apparatus and method using ion bombardment Surface analysis apparatus and method using ion bombardment

2007-06-26

2009-12-22

Berman, Jack I (Department: 2881)

Radiant energy

Ionic separation or analysis

Ion beam pulsing means with detector synchronizing means

C250S281000, C250S282000, C250S285000, C702S027000, C702S028000

Reexamination Certificate

active

07635840

ABSTRACT:
A surface analysis apparatus includes a unit configured to bombard a sample surface with at least two types of ions having different sizes; a measurement device for measuring, with a time-of-flight secondary ion mass spectrometer, a mass spectrum of ions emitted from the sample surface; and an information processor outputting a difference between two mass spectra measured by bombardment of different types of ions.

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S.R. Bryan, et al., “Analysis of Thin Organic Films using Gold Cluster and C60Ion Beams”, Physical Electronics, 19thAnnual SIMS Workshop, May 2006, 23 pgs.

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